Scanning Electron Microscopy
Core Facility​

Electron optics

• Extreme high-resolution field emission Elstar SEM Column with:
  
  • Magnetic immersion objective lens
  • High-stability Schottky field emission gun to provide stable high-resolution analytical currents
  • UC+ monochromator technology
• SmartAlign: user-alignment-free technology
• 60-degree dual objective lens with pole piece protection allows tilting larger samples
• Automated heated apertures to ensure cleanliness and touch free aperture exchange
• Electrostatic scanning for higher deflection linearity and speed
• Thermo Scientific ConstantPower™ Lens Technology for higher thermal stability
• Integrated Fast Beam Blanker
• Beam deceleration with stage bias from 0 V to -4 kV

Electron beam resolution

• At optimum WD:
  
  • 0.7 nm at 1 kV
  • 1.0 nm at 500 V (ICD)
• At coincident point:
  
  • 0.6 nm at 15 kV
  • 1.2 nm at 1 kV

Electron beam parameter space

• Electron beam current range: 0.8 pA to 100 nA at all accelerating voltages
• Accelerating voltage range: 350 V – 30 kV
• Landing energy range: 20* eV – 30 keV
• Maximum horizontal field width: 2.3 mm at 4 mm WD

Ion optics

High-performance PFIB column with unique Inductively Coupled Plasma (ICP) source supporting four ion species with fast switching capability

• Ion species (primary ion beam): Xe, Ar, O, N
• Switching time <10 minutes, only software operation
• Ion beam current range: 1.5 pA to 2.5 μA
• Accelerating voltage range: 500 V – 30 kV
• Maximum horizontal field width: 0.9 mm at beam coincidence point

Xe Ion beam resolution at coincident point

• <20 nm at 30 kV using preferred statistical method
• <10 nm at 30 kV using selective edge method

Detectors

• Elstar Column in-lens SE/BSE detector (TLD-SE, TLD-BSE)
• Elstar Column in-column SE/BSE detector (ICD)
• Everhart-Thornley SE detector (ETD)
• IR camera for viewing sample/column
• High-performance in-chamber electron and ion detector (ICE) for secondary ions (SI) and electrons (SE)
• In-chamber Thermo Scientific Nav-Cam™ Sample Navigation Camera
• Retractable low-voltage, high-contrast directional solid-state backscatter electron detector (DBS)
• Retractable STEM 3+ detector with BF/ DF/ HAADF segments
• Integrated beam current measurement

EDS EDAX Octane Elite SDD Super (70 mm²)

• 125 eV resolution at Mn Ka at 10k cps
• Carbon detection above 750k input cps for ultra-fast mapping and particle acquisition
• Detection range: Al L (73 eV) to Am
• Throughput: 850k ocps at 2.0m icps
• Al L to Al K peak height ratio of 1:1 at 2.5 kV
• Cooling: Peltier

ToF-SIMS TOFWERK CTOF C1

• Mass Range: up to 20000 Th
• Mass Resolving Power: 700–1100 Th/Th
• Mass Accuracy: < 5 ppm
• Burst Spectra Rate: up to 80000 spectra/s
• Continuous Spectra Rate: up to 2000 spectra/s
• Intensity Dynamic Range:
  
  • 6 orders of magnitude in 10 ms
  • 7 orders of magnitude per second

Stage and sample

Flexible, five-axis motorized stage:

• XY range: 110 mm
• Z range: 65 mm
• Rotation: 360° (endless)
• Tilt range: -38° to +90°
• XY repeatability: 3 μm
• Max sample height: Clearance 85 mm to eucentric point
• Max sample weight at 0° tilt: 5 kg (including sample holder)
• Max sample size: 110 mm with full rotation (larger samples
  possible with limited rotation)
• Compucentric rotation and tilt

Vacuum system

• Complete oil-free vacuum system
• Chamber vacuum: < 2.6×10^-6 mbar (after 24-hour pumping)
• Evacuation time: <5 minutes

Chamber

• E- and I-beam coincidence point at analytical WD (4 mm SEM)
• Inside width: 379 mm
• Integrated plasma cleanerSample holder
• Multi-purpose specimen holder with adjustable height
• Vise specimen holder to clamp irregular, large or heavy specimens to the specimen stage*
• Universal mounting base (UMB) for stable, flexible mounting of many combinations of samples and holders such as flat and pretilt stubs, and row holders for TEM grids
• Various wafer and custom holders available

Accessories

Gas Injection Systems (GIS)

• Single GIS
  
  • Platinum deposition
  • Tungsten deposition

Additional Hardware

• FIB Charge Neutralizer
• EasyLift™ NanoManipulator for in situ sample manipulation
• QuickLoader™ Loadlock for rapid sample exchange

Software

• Thermo Scientific AutoTEM™ Software for automated S/TEM sample preparation
• Thermo Scientific AutoScript™ 4 Software advanced automation suite for DualBeams
• Thermo Scientific Maps™ Software for automatic acquisition of large images and optional correlative work
• Auto Slice and View Software – automated sequential mill and view to collect series of slices images for 3D reconstruction
• Avizo Software – 3D reconstruction and analysis software
• ToF-SIMS Explorer for acquisition and processing 3D ToF-SIMS data